- About SD type and SN type
The SN type has been widely used by customers who have been using our exposure and irradiation equipment for a long time, ensuring the continuity of process management. The SD type is recommended for customers who are already using illuminance meters made by other companies in the manufacturing process of semiconductors and liquid crystal substrates, and who value ensuring data compatibility with those measuring instruments (our exposure equipment However, the SD type is adopted for projection type exposure equipment and peripheral exposure equipment for liquid crystal substrates), and we recommend it to customers who are completely new to using illuminance meters.
- About the indicated value of SD type and SN type
For SN type, the indicated value for SD type is used to ensure compatibility with old process data (measured under the same measurement conditions as the 365 nm emission line of a high-pressure UV lamp used as a radiation source for calibration by our measurement group. It is adjusted to display 39% higher than the illuminance value displayed when
- About data compatibility with illuminometers and photometers made by other companies
Unlike illuminometers and photometers for visible light (illuminance meters and photometers that measure the brightness of homes, offices, stores, museums, etc. in units of LUX), it can be applied to all UV illuminometers and photometers. The standard has not yet been established (it seems that JIS standardization work is being done for a limited number of uses). Even if the relative spectral sensitivity of each company is made for the purpose of measuring the illuminance from a light source mainly composed of 365 nm emission lines, the measurement peak wavelength (the wavelength whose relative spectral sensitivity characteristic is indicated by 1), The short wavelength side (around 300 nm to 310 nm) and the long wavelength side (around 380 nm to 400 nm) have slightly different rising and falling wavelengths and curves before and after. Efforts have also been made in terms of design to bring the light-receiving angle characteristic of the receiver, called the COSθ characteristic, closer to the ideal curve, but the reality is that it has not been achieved.
UV measuring instrument/photodetector/ spectral sensitivity characteristics
UV measuring instrument/receiver/ spectral sensitivity characteristics
- You can manage the illuminance and light intensity of exposure equipment, UV conveyors, etc.
- Compact, lightweight, thin, handy type.
- The model can be selected from UV-351, UV-351-25, UV-351-42 according to the application.
- Various measurement modes can be selected, such as light intensity measurement, illuminance measurement, and peak illuminance measurement.
- The metal body is strong against heat and has a robust structure.
Model
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UV-351
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Measurement wavelength range
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310-385nm (equivalent to UV-SD35)
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Measurement illuminance range
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0.1-100.0mW / cm2
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Measurement light intensity range
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1 to 19999mJ / cm2
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Fitting accuracy
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Within ± 1.5% of our UV standard
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Repeat accuracy
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Within ± 1.5%
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