Easy to carry and install. Easy change of gas type and maintenance! Calibration documents can be issued. Various gas detections can be made by replacing sensors (sensor unit) . Maintenance can be easily done on site. It is widely used in universities and research periods etc. Gas selection: Click here to select gas species such as oxygen, carbon monoxide, hydrogen sulfide, hydrogen, flammable gas, toxic gas, etc.
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Portable desktop type gas detection alarm device PGD-120 [New Cosmos Electric] |
The sensor unit can be replaced according to the gas, and one can detect various semiconductor material gases. Alarm sound
logger function in two stages enables data management on PC. Please select semiconductor material gas.
Ammonia, silane, dichlorosilane, arsine, phosphine, diborane, hydrogen selenide, germane, chlorine, chlorine trifluoride, hydrogen chloride, hydrogen fluoride, hydrogen bromide, nitrogen monoxide, hydrogen sulfide, carbon monoxide, disilane, fluorine・ Ozone etc.
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Semiconductor material gas alarm detector XPS-7 | ||
Sensor unit for XPS-7 |
Detects a slight leak of semiconductor material gas. For gas leak inspection in the field using toxic gas such as semiconductor factory.
It is compatible with various semiconductor material gases (such as arsine, phosphine, cyborane, silane, hydrogen, etc.) with the ability to issue calibration documents for the safety of hydrogen related facilities
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Semiconductor Material Gas Collector XP-703DIII |